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paper/method/axis/default.typ
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29
paper/method/axis/default.typ
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== Definition of the axes
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坐标轴的定义。
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坐标轴在我们的研究中需要被明确定义,因为 4H-SiC 的各向异性,以及在不同文献中坐标轴的不同定义。
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4H-SiC 晶体中存在镜面(mirror plane)和滑移面(glide plane),如图所示。
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4H-SiC 的原子结构沿镜面反演后不变,但沿滑移面反演后还需要沿 z 轴平移半个晶格常数才能保持不变。
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我们定义 x 轴平行于滑移面,y 轴与 x 轴垂直并平行于一个镜面。
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同时,我们定义 a 轴与 x 轴平行,b 轴与 a 轴夹角为 120 度。
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在此定义下,晶圆的切边沿 x 方向(即 [$11 overline(2) 0$] 方向),
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台阶流外延过程中台阶台阶边沿平行于 y 方向(即 [$1 overline(1) 00$] 方向),生长方向为 x 方向(即 [$11 overline(2) 0$])。
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此定义与 material projects 数据库以及大部分文献中的定义一致,而与其它一些文献中的定义不一致。
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(最后一行补充参考文献)。
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The axes in our study need to be clearly defined due to the anisotropy of 4H-SiC.
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In the 4H-SiC crystal, there are three mirror planes and three glide planes, as shown in @figure-axis.
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The atomic structure of 4H-SiC remains unchanged under reflection across a mirror plane,
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but it requires a translation of $1/2c$ to remain unchanged under reflection across a glide plane.
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We define the x-axis parallel to the glide plane,
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and the y-axis perpendicular to the x-axis and parallel to a mirror plane.
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Concurrently, we define the a-axis parallel to the x-axis,
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and the b-axis at an angle of 120#sym.degree to the a-axis.
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Under this definition, the wafer edge is along the x-axis (i.e. [$11 overline(2) 0$]),
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the step edge during step-flow epitaxy is parallel to the y-axis (i.e. [$1 overline(1) 00$]),
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and the growth direction is along the x-axis (i.e. [$11 overline(2) 0$]).
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This definition is consistent with most literature and the Materials Project database,
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while it differs from some other literature.
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#include "fig-axis.typ"
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= Method
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#include "axis/default.typ"
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#include "wafer.typ"
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#include "experiment/default.typ"
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#include "model.typ"
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@@ -15,14 +15,3 @@ The Al doping concentrations, determined by SIMS,
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The W#sub[1]–W#sub[4] had an epitaxial layer thickness of 1 μm, while W#sub[5] had a thickness of 2 μm.
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The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafers, respectively.
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坐标轴的定义
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坐标轴的定义需要仔细考量才能使计算与实验结果对应。
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4H-SiC 存在三个互相之间夹角为 60 度的镜面(mirror plane),同时还存在三个互相之间夹角为 60 度的滑移面(glide plane)。
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我们定义某一个滑移面与基平面的交线为 x 轴,与此滑移面相垂直的镜面与基平面的交线为 y 轴。
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同时,我们定义沿 x 方向为晶格的 a 轴(即 a 轴在一个滑移面内)。
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此定义与实验中常用的定义一致,包括晶圆的切边沿 xxx 方向(即 xx 轴)、台阶流外延过程中台阶生长的方向为 xxx (即 xx 轴),台阶边沿 沿 y 方向(即 yy 轴)。
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此定义也与 material projects 数据库以及一些文献中的定义一致。
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然而,此定义与其它一些文献中的定义不同,尤其是与群论中的定义不一致;本文中引用结论时,会将它们的定义转换为本文的定义。
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#include "fig-axis.typ"
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@@ -18,7 +18,10 @@
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- [x] 画出原子和键,75
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- [x] 调整图片,使得不太杂乱,80
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- [x] 合成图片,20
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- [ ] 文字
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- [x] 再写中文,15
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- [x] 英文,20
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- [ ] 调整画图,20
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- [ ] 补充参考文献
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- [/] 拉曼实验
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- [x] 仪器设置
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- [x] 中文
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@@ -98,5 +101,5 @@
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- [ ] 实验
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- [ ] 测试不同片子的背面 LOPC,确认它们的掺杂是否相同
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- [ ] 拟合
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- [ ] 拟合最后一次正入射的结果,确定峰位移与掺杂等的关系
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- [ ] 拟合最后一次正入射的结果,确定峰位移与掺杂等的关系,60
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- [ ] 拟合带 LOPC 的 LO
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