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TODO.md
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TODO.md
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* [ ] 文本
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* [ ] method
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* [ ] 无缺陷和缺陷的模型大小、缺陷结构
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* [ ] 几个外延片
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* [x] 中文
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* [x] 英文
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* [ ] 调整语言
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* [ ] 拉曼实验
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* [ ] 模型总述
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* [ ] 无缺陷和点缺陷的模型大小、结构
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* [x] 中文
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* [ ] 英文
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* [ ] 填充数据和引用
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* [ ] 面缺陷的模型大小、结构
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* [ ] 第一性原理计算和声子计算的工具
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* [x] 中文
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* [ ] 英文
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生长时 Si/C 比分别为 0.7 1.2 1.6 2.4 2.0。、
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所有外延片都有 4 度斜切。
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Five 6-inch p-type epitaxial wafers on n-type substrates were used, denoted as W#sub[1]-W#sub[5].
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All epitaxial layers were grown using step-flow method with a 4° offcut angle.
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The Al doping concentrations in the epitaxial layers
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were 0.1, 3.8, 5.1, 6.4, and 10 #sym.times 10 cm#super[-3] (measured using SIMS)
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with W#sub[1]-W#sub[4] having a thickness of 1 μm and W#sub[5] having a thickness of 2 μm, respectively.
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The Si/C ratios of the five wafers during growth were 0.7, 1.2, 1.6, 2.4, and 2.0, respectively.
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Five 6-inch p-type epitaxial wafers (W#sub[1]–W#sub[5]) were fabricated on n-type substrates
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using the step-flow growth method with a 4° offcut angle.
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The Al doping concentrations, determined by SIMS,
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were 0.1, 3.8, 5.1, 6.4, and 10 #sym.times 10 cm#super[-3] for W#sub[1]–W#sub[5], respectively.
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W#sub[1]–W#sub[4] had an epitaxial layer thickness of 1 μm, while W#sub[5] had a thickness of 2 μm.
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The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafers, respectively.
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拉曼设备的型号。激光的波长,背散射。共焦针孔。
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