book/SiC/Estimation of supersaturation at steps during chemical vapor deposition of 4H-SiC (0001) from reported growth rate and cross-sectional profile of spiral hillock.md
2024-06-11 17:04:10 +08:00

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Estimation of supersaturation at steps during chemical vapor deposition of 4H-SiC (0001) from reported growth rate and cross-sectional profile of spiral hillock