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陈浩南 2024-04-26 22:59:05 +08:00

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SiC/MD simulation study on defect evolution and doping efficiency of p-type doping of 3C-SiC by Al ion implantation with subsequent annealing.pdf (Stored with Git LFS) Normal file

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SiC/MD simulation study on defect evolution and doping efficiency of p-type doping of 3C-SiC by Al ion implantation with subsequent annealing.pdf (Stored with Git LFS)

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