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# Determination of the transport properties in 4H-SiC wafers by Raman scattering measurement
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## Introduction
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通常测试外延层电学性质的方法是 Hall 效应或 C-V 曲线,但是这都需要接触样品,并且只能测量较大范围内的平均性质。
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使用拉曼测试可以测试较小范围内的情况,并且不需要预先处理。
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拉曼/Determination of the transport properties in 4H-SiC wafers by Raman scattering measurement.pdf
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拉曼/Determination of the transport properties in 4H-SiC wafers by Raman scattering measurement.pdf
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拉曼/碳化硅载流子浓度的拉曼光谱表征研究.pdf
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拉曼/碳化硅载流子浓度的拉曼光谱表征研究.pdf
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