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// SiC 是很好的材料。 4H-SiC 是一种具有优良性质的半导体材料,包括宽禁带、高临界电场强度、高热导率和沿 c 轴的高电子迁移率,因此受到了广泛的研究。
// 其中4H-SiC 是SiC的一种多型它的性质更好近年来随着外延工艺的成熟而获得了更多的关注。 受益于外延技术的发展和新能源产业的需求增长4H-SiC 在功率电子器件中得到了广泛应用。
然而4H-SiC 器件的性能仍然受到缺陷的限制,如何在生长和工作条件下避免缺陷的产生仍然是一个挑战。
此外,用于表征 SiC 掺杂的方案如二次离子质谱SIMS和霍尔效应测量通常是破坏性的且耗时因此迫切需要开发原位和非破坏性的表征技术。
// 随着尺寸缩小4H-SiC 中的缺陷对器件性能的影响更加显著。(纳米材料?
The 4H-silicon carbide (SiC) has long attracted a lot of research The 4H-silicon carbide (SiC) has long attracted a lot of research
thanks to its wider bandgap, higher critical electric field strength, thanks to its wider bandgap, higher critical electric field strength,
higher thermal conductivity, and higher electron mobility along the c-axis higher thermal conductivity, and higher electron mobility along the c-axis
@@ -20,9 +25,11 @@ Furthermore,
are destructive and time-consuming. are destructive and time-consuming.
Therefore, there is a pressing need to develop an in-situ and non-destructive characterization techniques. Therefore, there is a pressing need to develop an in-situ and non-destructive characterization techniques.
// 声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。 声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。
// 声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。 声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。
// 拉曼光谱是最常用的方法,它提供了一种无损、非接触、快速和局部的声子测量方法,已被广泛用于确定晶体的原子结构(包括区分 SiC 的多型)。 拉曼光谱是最常用的方法,它提供了一种无损、非接触、快速和局部的声子测量方法
早有关于拉曼的研究,且拉曼已被广泛用于区分 SiC 的多型。
Phonons (quantized atomic vibrations) play a fundamental role Phonons (quantized atomic vibrations) play a fundamental role
in understanding the atomic structure as well as the thermal and electrical properties of semiconductors. in understanding the atomic structure as well as the thermal and electrical properties of semiconductors.
They could be probed by various experimental techniques, They could be probed by various experimental techniques,
@@ -37,18 +44,20 @@ Studies in Raman scattering of 4H-SiC have been conducted since as early as 1968
and nowadays have been widely employed to identification of different SiC polytypes and nowadays have been widely employed to identification of different SiC polytypes
@guo_characterization_2012 @yan_study_2016 @hundhausen_characterization_2008 @nakashima_raman_2013. @guo_characterization_2012 @yan_study_2016 @hundhausen_characterization_2008 @nakashima_raman_2013.
// 近年来,更多信息被从拉曼光谱中挖掘出来。 近年来,更多信息被从拉曼光谱中挖掘出来。
// LOPC 已经被用于快速估计 n 型 SiC 的掺杂浓度。 LO 声子峰或 LOPC 峰已经被证明与自由载流子的类型和浓度有关,它们已经被用于估计离子注入层的厚度和 n SiC 的掺杂浓度。
// 层错的拉曼光谱也已经被研究,可以被用于检测特定结构层错的存在和位置。 部分层错的拉曼光谱也已经被研究,可以被用于检测特定结构层错的存在和位置。
// 掺杂对拉曼光谱的潜在影响也已经被研究。 也有一些研究探讨了掺杂对拉曼光谱的影响。 // TODO: 具体是什么影响?
// 然而,拉曼光谱上仍有一些不知来源的峰;同时,一些也缺少一些理论上预测应该存在的峰。 然而,拉曼光谱上仍有一些不知来源的峰;同时,也缺少一些理论上预测应该存在的峰。
// 此外,预测掺杂导致的新峰也没有说明原因。 此外,预测掺杂导致的新峰也没有说明原因。
In recent years, increasingly rich information has been extracted from Raman spectra of 4H-SiC. In recent years, increasingly rich information has been extracted from Raman spectra of 4H-SiC.
Longitudinal optical phononplasmon coupling (LOPC) peek Longitudinal optical phononplasmon coupling (LOPC) peek
has been utilized to rapidly estimate the doping concentration in n-type SiC, has been utilized to rapidly estimate to identify doping type in different layers
// TODO: 增加使用 LOPC 估计 n 型掺杂浓度的论文 // depth profiling xxx
and the existence of LO peek have been used to different the focus in p-type epilayer and in n-type substrate. and the doping concentration in n-type SiC.
// TODO: LOPC 来区分外延层和衬底的文献 // Raman scattering from anisotropic LO-phonon-plasmo
Peeks associated with some stacking faults have also been investigated Peeks associated with some stacking faults have also been investigated
and used to detect the presence and location of specific structural faults. and used to detect the presence and location of specific structural faults.
// TODO: 缺陷峰,并补充对应的文献 // TODO: 缺陷峰,并补充对应的文献