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// SiC 是很好的材料。
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4H-SiC 是一种具有优良性质的半导体材料,包括宽禁带、高临界电场强度、高热导率和沿 c 轴的高电子迁移率,因此受到了广泛的研究。
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// 其中,4H-SiC 是SiC的一种多型,它的性质更好,近年来随着外延工艺的成熟而获得了更多的关注。
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受益于外延技术的发展和新能源产业的需求增长,4H-SiC 在功率电子器件中得到了广泛应用。
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然而,4H-SiC 器件的性能仍然受到缺陷的限制,如何在生长和工作条件下避免缺陷的产生仍然是一个挑战。
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此外,用于表征 SiC 掺杂的方案(如二次离子质谱(SIMS)和霍尔效应测量)通常是破坏性的且耗时,因此迫切需要开发原位和非破坏性的表征技术。
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// 随着尺寸缩小,4H-SiC 中的缺陷对器件性能的影响更加显著。(纳米材料?
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The 4H-silicon carbide (SiC) has long attracted a lot of research
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The 4H-silicon carbide (SiC) has long attracted a lot of research
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thanks to its wider bandgap, higher critical electric field strength,
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thanks to its wider bandgap, higher critical electric field strength,
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higher thermal conductivity, and higher electron mobility along the c-axis
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higher thermal conductivity, and higher electron mobility along the c-axis
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@@ -20,9 +25,11 @@ Furthermore,
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are destructive and time-consuming.
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are destructive and time-consuming.
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Therefore, there is a pressing need to develop an in-situ and non-destructive characterization techniques.
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Therefore, there is a pressing need to develop an in-situ and non-destructive characterization techniques.
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// 声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。
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声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。
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// 声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。
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声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。
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// 拉曼光谱是最常用的方法,它提供了一种无损、非接触、快速和局部的声子测量方法,已被广泛用于确定晶体的原子结构(包括区分 SiC 的多型)。
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拉曼光谱是最常用的方法,它提供了一种无损、非接触、快速和局部的声子测量方法。
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早有关于拉曼的研究,且拉曼已被广泛用于区分 SiC 的多型。
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Phonons (quantized atomic vibrations) play a fundamental role
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Phonons (quantized atomic vibrations) play a fundamental role
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in understanding the atomic structure as well as the thermal and electrical properties of semiconductors.
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in understanding the atomic structure as well as the thermal and electrical properties of semiconductors.
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They could be probed by various experimental techniques,
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They could be probed by various experimental techniques,
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@@ -37,18 +44,20 @@ Studies in Raman scattering of 4H-SiC have been conducted since as early as 1968
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and nowadays have been widely employed to identification of different SiC polytypes
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and nowadays have been widely employed to identification of different SiC polytypes
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@guo_characterization_2012 @yan_study_2016 @hundhausen_characterization_2008 @nakashima_raman_2013.
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@guo_characterization_2012 @yan_study_2016 @hundhausen_characterization_2008 @nakashima_raman_2013.
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// 近年来,更多信息被从拉曼光谱中挖掘出来。
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近年来,更多信息被从拉曼光谱中挖掘出来。
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// LOPC 已经被用于快速估计 n 型 SiC 的掺杂浓度。
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LO 声子峰或 LOPC 峰已经被证明与自由载流子的类型和浓度有关,它们已经被用于估计离子注入层的厚度和 n 型 SiC 的掺杂浓度。
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// 层错的拉曼光谱也已经被研究,可以被用于检测特定结构层错的存在和位置。
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部分层错的拉曼光谱也已经被研究,可以被用于检测特定结构层错的存在和位置。
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// 掺杂对拉曼光谱的潜在影响也已经被研究。
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也有一些研究探讨了掺杂对拉曼光谱的影响。 // TODO: 具体是什么影响?
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// 然而,拉曼光谱上仍有一些不知来源的峰;同时,一些也缺少一些理论上预测应该存在的峰。
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然而,拉曼光谱上仍有一些不知来源的峰;同时,也缺少一些理论上预测应该存在的峰。
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// 此外,预测掺杂导致的新峰也没有说明原因。
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此外,预测掺杂导致的新峰也没有说明原因。
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In recent years, increasingly rich information has been extracted from Raman spectra of 4H-SiC.
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In recent years, increasingly rich information has been extracted from Raman spectra of 4H-SiC.
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Longitudinal optical phonon–plasmon coupling (LOPC) peek
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Longitudinal optical phonon–plasmon coupling (LOPC) peek
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has been utilized to rapidly estimate the doping concentration in n-type SiC,
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has been utilized to rapidly estimate to identify doping type in different layers
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// TODO: 增加使用 LOPC 估计 n 型掺杂浓度的论文
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// depth profiling xxx
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and the existence of LO peek have been used to different the focus in p-type epilayer and in n-type substrate.
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and the doping concentration in n-type SiC.
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// TODO: LOPC 来区分外延层和衬底的文献
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// Raman scattering from anisotropic LO-phonon-plasmo
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Peeks associated with some stacking faults have also been investigated
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Peeks associated with some stacking faults have also been investigated
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and used to detect the presence and location of specific structural faults.
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and used to detect the presence and location of specific structural faults.
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// TODO: 缺陷峰,并补充对应的文献
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// TODO: 缺陷峰,并补充对应的文献
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