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@@ -23,21 +23,24 @@ The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafe
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大部分实验中,我们使用 532 nm 的激光,少部分实验中使用 325 nm 的激光以观测紫外拉曼。
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有三个不同的入射配置,包括正入射、掠入射、边入射。
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考虑到 4 度斜切和 4H-SiC 几乎各向同性的折射率(2.73) @shaffer_refractive_1971 ,掠入射的入射角大约为 25 度。
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在正散射过程中,我们使用 100 微米的共焦针孔,以尽可能提高 z 方向的分辨率 @song_depth_2020。
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在正散射过程中,我们使用 100 微米的共焦针孔,以尽可能提高 z 方向的分辨率 @song_depth_2020;其它情况使用常用的 200 微米针孔以提高信噪比。
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此外,在正入射和边入射时,拉曼散射信号较强,因此我们使用较短的积分时间(约 60 秒),
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而在掠入射时,拉曼信号较弱,因此使用较长的积分时间(约 300 秒)。
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All our Raman experiments were performed using a LabRAM HR Evolution system with back-scattering configuration,
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where collected scattered light has a reversed wavevector direction compared to the incident light.
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A 532 nm laser was used in most experiments,
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while a 325 nm laser was used to observe Raman signals under ultraviolet excitation.
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Three different incidece configurations were used, as shown in @figure-incidence,
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including normal incidence, where the laser beam is perpendicular to the epitaxial surface;
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grazing incidence, where the laser beam is nearly parallel to the epitaxial surface;
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and edge incidence, where the laser beam is incident at the edge of the wafer, instead of the epitaxial surface.
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Taking the 4° offcut angle
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and the nearly isotropic refractive index 2.73 of 4H-SiC @shaffer_refractive_1971 into account,
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the wavevector in 4H-SiC during grazing incidence is about 25° to the c axis.
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During normal incidence, a 100 μm confocal pinhole was used to improve the z-direction resolution @song_depth_2020;
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while during other configurations, 200 μm confocal pinhole was used to improve the signal-to-noise ratio.
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All Raman experiments were conducted using a LabRAM HR Evolution system in a back-scattering configuration,
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where the collected scattered light propagates in the opposite direction to the incident laser.
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A 532 nm laser served as the primary excitation source,
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while a 325 nm laser was employed for only ultraviolet Raman measurements.
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Three distinct incidence configurations were utilized, as illustrated in @figure-incidence:
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(i) normal incidence, where the laser incident perpendicularly to the epitaxial surface;
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(ii) grazing incidence, where the laser incident nearly parallelly to the epitaxial surface;
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and (iii) edge incidence, where the laser is incident at the wafer edge and perpendicularly to the edge surface.
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Considering the 4° offcut angle and the nearly isotropic refractive index of 2.73 for 4H-SiC @shaffer_refractive_1971,
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the refracted laser in 4H-SiC during grazing incidence forms an angle of approximately 25° with the c axis.
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A 100 μm confocal pinhole was used for normal incidence to enhance axial (z-direction) resolution @song_depth_2020,
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while a 200 μm pinhole was employed for the other configurations to improve the signal-to-noise ratio.
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Besides, the integration time was set to 60 seconds for normal and edge incidence,
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while it was extended to 300 seconds for grazing incidence due to the weaker Raman signal.
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#include "figure-incidence.typ"
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