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@@ -23,21 +23,24 @@ The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafe
大部分实验中,我们使用 532 nm 的激光,少部分实验中使用 325 nm 的激光以观测紫外拉曼。
有三个不同的入射配置,包括正入射、掠入射、边入射。
考虑到 4 度斜切和 4H-SiC 几乎各向同性的折射率2.73 @shaffer_refractive_1971 ,掠入射的入射角大约为 25 度。
在正散射过程中,我们使用 100 微米的共焦针孔,以尽可能提高 z 方向的分辨率 @song_depth_2020
在正散射过程中,我们使用 100 微米的共焦针孔,以尽可能提高 z 方向的分辨率 @song_depth_2020;其它情况使用常用的 200 微米针孔以提高信噪比
此外,在正入射和边入射时,拉曼散射信号较强,因此我们使用较短的积分时间(约 60 秒),
而在掠入射时,拉曼信号较弱,因此使用较长的积分时间(约 300 秒)。
All our Raman experiments were performed using a LabRAM HR Evolution system with back-scattering configuration,
where collected scattered light has a reversed wavevector direction compared to the incident light.
A 532 nm laser was used in most experiments,
while a 325 nm laser was used to observe Raman signals under ultraviolet excitation.
Three different incidece configurations were used, as shown in @figure-incidence,
including normal incidence, where the laser beam is perpendicular to the epitaxial surface;
grazing incidence, where the laser beam is nearly parallel to the epitaxial surface;
and edge incidence, where the laser beam is incident at the edge of the wafer, instead of the epitaxial surface.
Taking the offcut angle
and the nearly isotropic refractive index 2.73 of 4H-SiC @shaffer_refractive_1971 into account,
the wavevector in 4H-SiC during grazing incidence is about 25° to the c axis.
During normal incidence, a 100 μm confocal pinhole was used to improve the z-direction resolution @song_depth_2020;
while during other configurations, 200 μm confocal pinhole was used to improve the signal-to-noise ratio.
All Raman experiments were conducted using a LabRAM HR Evolution system in a back-scattering configuration,
where the collected scattered light propagates in the opposite direction to the incident laser.
A 532 nm laser served as the primary excitation source,
while a 325 nm laser was employed for only ultraviolet Raman measurements.
Three distinct incidence configurations were utilized, as illustrated in @figure-incidence:
(i) normal incidence, where the laser incident perpendicularly to the epitaxial surface;
(ii) grazing incidence, where the laser incident nearly parallelly to the epitaxial surface;
and (iii) edge incidence, where the laser is incident at the wafer edge and perpendicularly to the edge surface.
Considering the offcut angle and the nearly isotropic refractive index of 2.73 for 4H-SiC @shaffer_refractive_1971,
the refracted laser in 4H-SiC during grazing incidence forms an angle of approximately 25° with the c axis.
A 100 μm confocal pinhole was used for normal incidence to enhance axial (z-direction) resolution @song_depth_2020,
while a 200 μm pinhole was employed for the other configurations to improve the signal-to-noise ratio.
Besides, the integration time was set to 60 seconds for normal and edge incidence,
while it was extended to 300 seconds for grazing incidence due to the weaker Raman signal.
#include "figure-incidence.typ"