diff --git a/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.md b/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.md new file mode 100644 index 0000000..60beb5e --- /dev/null +++ b/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.md @@ -0,0 +1,105 @@ +$\require{physics}$ + +# Abstract + +声表面波就是在表面传播、波矢在面内的波。 +通常使用两个叉指电极(interdigitated electrodes,IDT),通过正向和逆向的压电效应,在一个电极上产生声表面波,经过介质传播,另一个电极上产生电压信号。 +一些需要测量的属性(例如温度)会影响声表面波的性质,从而被检测出来。 + +图片来自维基百科。 + +![undefined](assets/SAW_device.png) + +# Introduction + +这些微型的传感器(sensor)和执行器(actuator)被称为微机电系统(Microelectromechanical Systems, MEMS)。 +对于生物传感的方面,The devices have the potential to transform a complete wet laboratory into a tiny, miniaturized chip. + +One of the major limitations comes from the requirements of simultaneous sensing and the actuation in an environment + while engaging with mutually exclusive physics and mechanisms. + +为了解决这些问题,基于声表面波的传感器被提出来了,它们可以同时进行传感和执行。 +这些器件通常被称为 SAW sensors 或者 SAW devices,但它的功能不局限于传感和执行,还包括 filters, oscillators, transformers, etc. + +电到声的转换叫 actuation,声到电的转换叫 sensing。 + +SAW sensor 用到了非常多的领域。 + +The acoustic devices are responsive to the physical parameters of the species + that interact with the mechanical properties of the guided waves in the SAW sensors. + +总结来说,要探测的物理参数包括:mass, density, viscosity, elastic modulus, conductivity, temperature, and pressure. + +通常来说,可以通过检测波的传播速度来检测需要的物理参数。按照线性近似可以得到: + +$$ +\dd{V} = \pdv{V}{m}\dd{m} + \pdv{V}{E}\dd{E} + \pdv{V}{M_i}\dd{M_i} + \pdv{V}{e_v}\dd{e_v} +$$ + +但仅仅通过速度,是无法区分这些量导致的变化的,因此需要更多的信息,常用的包括: +* the change in amplitude of the central frequency +* the frequency shift of the given frequency input, +* kurtosis +* change in phase +* higher-order frequency peaks to measure nonlinearity + +SAW sensor 的质量可以通过 sensitivity 和 selectivity 来衡量。 +Sensitivity 是指对于某个物理参数的响应程度(而不是直接对测得的电流或电压等的响应程度)。 +以受主和受体的结合为例子,sensitivity 是指多少受主被结合就可以检测出来,而 selectivity 是指其它不是目标的受主的出现是否会影响检测结果。 + +# Types of Waves in SAW Devices + +## Rayleigh Waves + +瑞丽波的波矢在面内,由纵波和 shear vertical 模式组成,原子运动轨迹是椭圆形的。仅仅存在于表面,有效深度通常小于波长。 +地震波在远离震源的地表传播时,就是瑞丽波。 + +![image-20240104230226306](assets/image-20240104230226306.png) + +#TODO: 更详细的性质 + +## Shear Horizontal Waves + +波矢量在面内,原子运动轨迹垂直于波矢且在面内。 +可以深入材料大约几个波长的深度,在生物化学传感中有广泛应用,特别适合用于液体中。还有许多其它优点。 + +#TODO: 更多优点 + +通常会使用一个 guiding layer 来优化器件的性能,这个 guiding layer 可以使用 SiO2, Si3N4, 和其它多晶材料。 + +#TODO: 更多理论 + +![image-20240105112520807](assets/image-20240105112520807.png) + +## Lamb Waves + +兰姆波穿透整个材料,相当于将薄膜层作为了一个波导。它分为对称和反对称两种,乍一看有点类似光学的平板波导,只不过这个是机械波。 + +![image-20240105113056845](assets/image-20240105113056845.png) + +#TODO: 更详细的理论 + +## Love Waves + +在一种介质(薄膜)中传播时可以穿透整个材料(类似于 SH 波),而在另一种介质中传播时只能在表面传播(类似于瑞利波)。 + +![image-20240105113614509](assets/image-20240105113614509.png) + +#TODO: 更详细的理论 + +# Materials for the SAW Devices + +#TODO + + +# Configuration of the Interdigitated Electrodes in the SAW Devices + +#TODO + +# SAW Applications + +#TODO + +# Conclusions + +#TODO \ No newline at end of file diff --git a/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.pdf b/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.pdf new file mode 100644 index 0000000..6794cfc --- /dev/null +++ b/SiC/Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.pdf @@ -0,0 +1,3 @@ +version https://git-lfs.github.com/spec/v1 +oid sha256:7d59f0492ddcf3ff068417f99d22c8b8fd784497d17d0b64e9b3a07555a36614 +size 12837781 diff --git a/SiC/assets/SAW_device.png b/SiC/assets/SAW_device.png new file mode 100644 index 0000000..cfe0672 --- /dev/null +++ b/SiC/assets/SAW_device.png @@ -0,0 +1,3 @@ +version https://git-lfs.github.com/spec/v1 +oid sha256:95fb7684ad0b8b56f007598ba4f72f9f61a59b93ac4c8c53a999533d1d2db0b3 +size 1733 diff --git a/SiC/assets/image-20240104230226306.png b/SiC/assets/image-20240104230226306.png new file mode 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