== Definition of the axes 坐标轴的定义。 坐标轴在我们的研究中需要被明确定义,因为 4H-SiC 的各向异性,以及在不同文献中坐标轴的不同定义。 4H-SiC 晶体中存在镜面(mirror plane)和滑移面(glide plane),如图所示。 4H-SiC 的原子结构沿镜面反演后不变,但沿滑移面反演后还需要沿 z 轴平移半个晶格常数才能保持不变。 我们定义 x 轴平行于滑移面,y 轴与 x 轴垂直并平行于一个镜面。 同时,我们定义 a 轴与 x 轴平行,b 轴与 a 轴夹角为 120 度。 在此定义下,晶圆的切边沿 x 方向(即 [$11 overline(2) 0$] 方向), 台阶流外延过程中台阶台阶边沿平行于 y 方向(即 [$1 overline(1) 00$] 方向),生长方向为 x 方向(即 [$11 overline(2) 0$])。 此定义与 material projects 数据库以及大部分文献中的定义一致,而与其它一些文献中的定义不一致。 (最后一行补充参考文献)。 The axes in our study need to be clearly defined due to the anisotropy of 4H-SiC. In the 4H-SiC crystal, there are three mirror planes and three glide planes, as shown in @figure-axis. The atomic structure of 4H-SiC remains unchanged under reflection across a mirror plane, but it requires a translation of $1/2c$ to remain unchanged under reflection across a glide plane. We define the x-axis parallel to the glide plane, and the y-axis perpendicular to the x-axis and parallel to a mirror plane. Concurrently, we define the a-axis parallel to the x-axis, and the b-axis at an angle of 120#sym.degree to the a-axis. Under this definition, the wafer edge is along the x-axis (i.e. [$11 overline(2) 0$]), the step edge during step-flow epitaxy is parallel to the y-axis (i.e. [$1 overline(1) 00$]), and the growth direction is along the x-axis (i.e. [$11 overline(2) 0$]). This definition is consistent with most literature and the Materials Project database, while it differs from some other literature. #include "fig-axis.typ" 依据此定义,K在Gamma点的x方向,M在Gamma点的y方向。(应该也需要画个图)