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@@ -8,16 +8,16 @@ The 4H-silicon carbide (SiC) has long attracted a lot of research
It has been widely used in power electronic devices It has been widely used in power electronic devices
thanks to the development of epitaxy technology and the increasing application in the new energy industry thanks to the development of epitaxy technology and the increasing application in the new energy industry
@tsuchida_recent_2018 @harada_suppression_2022 @sun_selection_2022. @tsuchida_recent_2018 @harada_suppression_2022 @sun_selection_2022.
However, the performance of 4H-SiC devices is still limited by the presence of defects, However, the performance of 4H-SiC devices remains constrained by the presence of defects,
which can be introduced during the growth process @nishio_triangular_2020 @demenet_tem_2005 which may be introduced during the growth process @nishio_triangular_2020 @demenet_tem_2005
and working conditions or arise under device operating conditions
@mahadik_ultraviolet_2012 @okada_dependences_2018 @iwahashi_extension_2017 @caldwell_driving_2010 @mahadik_ultraviolet_2012 @okada_dependences_2018 @iwahashi_extension_2017 @caldwell_driving_2010
@miyanagi_annealing_2006 @iijima_correlation_2017. @miyanagi_annealing_2006 @iijima_correlation_2017.
Moreover, Furthermore,
characterization of the doping properties of SiC is usually performed by secondary ion mass spectrometry (SIMS) conventional methods for characterizing the doping properties of SiC
and Hall effect measurement, such as secondary ion mass spectrometry (SIMS) and Hall effect measurements),
which are destructive and time-consuming, are destructive and time-consuming.
and non-destructive ad-hoc methods still need to be developed. Therefore, there is a pressing need to develop non-destructive and efficient characterization techniques.
// 声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。 // 声子(量子化的原子振动)在理解晶体的原子结构以及热电性质方面起着重要作用。
// 声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。 // 声子可以通过多种实验技术来探测,包括 EELS、IR 吸收谱等。