diff --git a/paper/main.typ b/paper/main.typ index 79770be..5df2f11 100644 --- a/paper/main.typ +++ b/paper/main.typ @@ -47,7 +47,7 @@ #set heading(numbering: "1.") #include "introduction.typ" -#include "method.typ" +#include "method/default.typ" #include "result/default.typ" #include "appendix/default.typ" #include "others/default.typ" diff --git a/paper/method.typ b/paper/method.typ deleted file mode 100644 index 61ae3a8..0000000 --- a/paper/method.typ +++ /dev/null @@ -1,21 +0,0 @@ -= Method - -== Experiment details - -外延片的厚度、掺杂浓度、生长 C/Si 比。 - -拉曼设备的型号。激光的波长,背散射。共焦针孔。对焦时向上或向下调整的距离。 - -画个图,表示正入射、掠入射和肩入射的角度关系。 - -Only back-scattering configurations were considered in this study. - -== Simulation details - -无缺陷的模型大小。带缺陷的情况下,模型大小,每个模型的代号和缺陷结构。 - -第一性原理计算使用 VASP,使用 PBE PAW,平面波截断能,K 点网格,涂抹,自洽和弛豫的 threshold。 -声子计算使用 phonopy phono3py ufo,BEC 修正的算法。 - -// 在略入射的过程中,角度的关系不大(即使是 60 度入射,和 90 度入射差别也不大)。因此我们按照折射角 20 度的结果计算。 -// 考虑到斜切,则大约是 24 度。 diff --git a/paper/method/default.typ b/paper/method/default.typ new file mode 100644 index 0000000..d66f506 --- /dev/null +++ b/paper/method/default.typ @@ -0,0 +1,51 @@ += Method + +== Experiment details + +外延片的厚度、掺杂浓度、生长 C/Si 比,斜切角度。 + +5 个 6 寸的 p 型外延片被使用,我们将它们称为 W#sub[i]。 +使用的衬底都是 n 型,前四个外延片的厚度为 1 微米,第五个外延片的厚度为 2 微米。 +外延层的 Al 掺杂浓度分别为 0.1 3.8 5.1 6.4 10 E18 cm#super[-3],使用 SIMS 测试。 +生长时 Si/C 比分别为 0.7 1.2 1.6 2.4 2.0。、 +所有外延片都有 4 度斜切。 + +Five 6-inch p-type epitaxial wafers on n-type substrates were used, denoted as W#sub[1]-W#sub[5]. +All epitaxial layers were grown using step-flow method with a 4° offcut angle. +The Al doping concentrations in the epitaxial layers + were 0.1, 3.8, 5.1, 6.4, and 10 #sym.times 10 cm#super[-3] (measured using SIMS) + with W#sub[1]-W#sub[4] having a thickness of 1 μm and W#sub[5] having a thickness of 2 μm, respectively. +The Si/C ratios of the five wafers during growth were 0.7, 1.2, 1.6, 2.4, and 2.0, respectively. + +拉曼设备的型号。激光的波长,背散射。共焦针孔。 + +拉曼设备的型号是 LabRAM HR Evolution,使用背散射。 +大部分实验中,我们使用 532 nm 的激光,少部分实验中使用 325 nm 的激光以观测紫外拉曼。 +有三个不同的入射配置,包括正入射、掠入射、边入射。 +考虑到 4 度斜切和 4H-SiC 几乎各向同性的折射率() @shaffer_refractive_1971 , +在正散射过程中,我们使用 100 微米的共焦针孔,以尽可能提高 z 方向的分辨率 @song_depth_2020。 + +All our Raman experiments were performed using a LabRAM HR Evolution system with back-scattering configuration, + where collected scattered light has a reversed wavevector direction compared to the incident light. +A 532 nm laser was used in most experiments, + while a 325 nm laser was used to observe Raman signals under ultraviolet excitation. +Three different incidece configurations were used, as shown in @figure-incidence: + normal incidence, where the laser beam is perpendicular to the epitaxial surface; + grazing incidence, where the laser beam is nearly parallel to the epitaxial surface; + and edge incidence, where the laser beam is incident at the edge of the wafer, instead of the epitaxial surface. +Taking the +During the experiments, a 100 μm confocal pinhole was used to improve the z-direction resolution @song_depth_2020. + + and the refracted light propagates with about 25 #sym.degree to the c axis; + +#include "figure-incidence.typ" + +== Simulation details + +无缺陷的模型大小。带缺陷的情况下,模型大小,每个模型的代号和缺陷结构。 + +第一性原理计算使用 VASP,使用 PBE PAW,平面波截断能,K 点网格,涂抹,自洽和弛豫的 threshold。 +声子计算使用 phonopy phono3py ufo,BEC 修正的算法。 + +// 在略入射的过程中,角度的关系不大(即使是 60 度入射,和 90 度入射差别也不大)。因此我们按照折射角 20 度的结果计算。 +// 考虑到斜切,则大约是 24 度。 diff --git a/paper/method/figure-incidence.typ b/paper/method/figure-incidence.typ new file mode 100644 index 0000000..851fec8 --- /dev/null +++ b/paper/method/figure-incidence.typ @@ -0,0 +1,5 @@ +#figure( + image("/画图/入射方向/main.svg"), + caption: [Light incidence configurations in our Raman experiments.], + placement: none, +) diff --git a/paper/ref.bib b/paper/ref.bib index e8c1a7b..26a73c5 100644 --- a/paper/ref.bib +++ b/paper/ref.bib @@ -535,7 +535,25 @@ dbcode: CJFQ dbname: CJFD2010 filename: WLXB201006094 CNKICite: 6}, - keywords = {温度, 电子拉曼散射, 碳化硅, 纵光学声子等离子体激元耦合模}, + keywords = {碳化硅, 温度, 电子拉曼散射, 纵光学声子等离子体激元耦合模}, pages = {4261--4266}, file = {n-SiC拉曼散射光谱的温度特性:/home/chn/Zotero/storage/M94LRGCT/n-SiC拉曼散射光谱的温度特性.pdf:application/pdf}, } + +@article{shaffer_refractive_1971, + title = {Refractive {Index}, {Dispersion}, and {Birefringence} of {Silicon} {Carbide} {Polytypes}}, + volume = {10}, + copyright = {https://doi.org/10.1364/OA\_License\_v1\#VOR}, + issn = {0003-6935, 1539-4522}, + url = {https://opg.optica.org/abstract.cfm?URI=ao-10-5-1034}, + doi = {10.1364/AO.10.001034}, + language = {en}, + number = {5}, + urldate = {2025-06-23}, + journal = {Applied Optics}, + author = {Shaffer, P. T. B.}, + month = may, + year = {1971}, + pages = {1034}, + file = {PDF:/home/chn/Zotero/storage/YJD5HYLD/Shaffer - 1971 - Refractive Index, Dispersion, and Birefringence of Silicon Carbide Polytypes.pdf:application/pdf}, +} diff --git a/画图/入射方向/main.svg b/画图/入射方向/main.svg new file mode 100644 index 0000000..797d1b3 --- /dev/null +++ b/画图/入射方向/main.svg @@ -0,0 +1,3 @@ +version https://git-lfs.github.com/spec/v1 +oid sha256:507618b7e7d114b9d67b283e0f51e8f16c864907f425b0cef7be0f51cdbdb0ef +size 22534