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2025-06-28 13:52:24 +08:00
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= Method = Method
== 4H-SiC wafer details and Raman experiments setup == 4H-SiC wafer details
外延片的厚度、掺杂浓度、生长 C/Si 比,斜切角度。 外延片的厚度、掺杂浓度、生长 C/Si 比,斜切角度。
@@ -17,6 +17,8 @@ The Al doping concentrations, determined by SIMS,
W#sub[1]W#sub[4] had an epitaxial layer thickness of 1 μm, while W#sub[5] had a thickness of 2 μm. W#sub[1]W#sub[4] had an epitaxial layer thickness of 1 μm, while W#sub[5] had a thickness of 2 μm.
The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafers, respectively. The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafers, respectively.
== Raman experiments setup
拉曼设备的型号。激光的波长,背散射。共焦针孔。 拉曼设备的型号。激光的波长,背散射。共焦针孔。
拉曼设备的型号是 LabRAM HR Evolution使用背散射。 拉曼设备的型号是 LabRAM HR Evolution使用背散射。
@@ -44,7 +46,7 @@ The integration time was set to 60 seconds for normal and edge incidence,
#include "figure-incidence.typ" #include "figure-incidence.typ"
== Simulation details == Atomic model establishment
我们建立了三类模型:无缺陷、点缺陷和面缺陷。 我们建立了三类模型:无缺陷、点缺陷和面缺陷。
@@ -52,7 +54,7 @@ Three types of models were established: defect-free models, point defect models,
无缺陷和点缺陷的模型 无缺陷和点缺陷的模型
无缺陷和点缺陷的模型尺寸为 xxA x xxA x xxA 无缺陷和点缺陷的模型尺寸 $12.4 angstrom times 10.7 #sym.angstrom times 10.1 #sym.angstrom$,包含了大约 128 个原子
我们认为是足够大的,因为无缺陷模型的结果与实验差距在一定范围内,且继续扩大模型对准确程度没有提升。 我们认为是足够大的,因为无缺陷模型的结果与实验差距在一定范围内,且继续扩大模型对准确程度没有提升。
对于点缺陷模型,我们考虑了 Si 空位、C 空位、N 替位、Al 替位。 对于点缺陷模型,我们考虑了 Si 空位、C 空位、N 替位、Al 替位。
分别记为 V#sub[Si]、V#sub[C]、N#sub[Si] Al#sub[C] 分别记为 V#sub[Si]、V#sub[C]、N#sub[Si] Al#sub[C]
@@ -61,7 +63,9 @@ Three types of models were established: defect-free models, point defect models,
此外还有人提出N 替换 C、C 替换 Si 的模型(引用), 此外还有人提出N 替换 C、C 替换 Si 的模型(引用),
此结构除了 h 位与 k 位的区别以外,还需要考虑发生替换的两个原子位于面内还是面外(将会导致对称性的不同)。 此结构除了 h 位与 k 位的区别以外,还需要考虑发生替换的两个原子位于面内还是面外(将会导致对称性的不同)。
The defect-free and point defect models were established with a size of xxA x xxA x xxA. The defect-free and point defect models were established
with a size of $12.4 #sym.angstrom times 10.7 #sym.angstrom times 10.1 #sym.angstrom$,
containing approximately 128 atoms.
This size should be large enough to calculate phonon properties for defect-free and point defect 4H-SiC, This size should be large enough to calculate phonon properties for defect-free and point defect 4H-SiC,
since the defect-free results obtained with these models were within 5% errors of the experimental data, since the defect-free results obtained with these models were within 5% errors of the experimental data,
and further increasing the model size did not improve the accuracy. and further increasing the model size did not improve the accuracy.
@@ -105,6 +109,8 @@ For surface defect models, larger models where used to ensure the accuracy of th
对于每类BPD我们考虑两个模型一个将两个 PD 包括在内,为了模拟 PBD 未分解或分解后边缘处的信号; 对于每类BPD我们考虑两个模型一个将两个 PD 包括在内,为了模拟 PBD 未分解或分解后边缘处的信号;
另一类则仅仅包含一个贯穿的层错,为了模拟 BPD 分解后在层错处的信号。 另一类则仅仅包含一个贯穿的层错,为了模拟 BPD 分解后在层错处的信号。
== Simulation details
计算工具和参数 计算工具和参数
第一性原理计算使用 VASP使用 PBE PAW平面波截断能在弛豫时使用 xx在计算声子时提高到 xx。 第一性原理计算使用 VASP使用 PBE PAW平面波截断能在弛豫时使用 xx在计算声子时提高到 xx。