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2025-06-28 13:41:42 +08:00
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@@ -28,18 +28,18 @@ The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafe
而在掠入射时,拉曼信号较弱,因此使用较长的积分时间(约 300 秒)。
All Raman experiments were conducted using a LabRAM HR Evolution system in a back-scattering configuration,
where the collected scattered light propagates in the opposite direction to the incident laser.
A 532 nm laser served as the primary excitation source,
where the scattered light was collected in the direction opposite to the incident laser.
A 532 nm laser was primarily used as the excitation source,
while a 325 nm laser was employed for only ultraviolet Raman measurements.
Three distinct incidence configurations were utilized, as illustrated in @figure-incidence:
(i) normal incidence, where the laser incident perpendicularly to the epitaxial surface;
(ii) grazing incidence, where the laser incident nearly parallelly to the epitaxial surface;
and (iii) edge incidence, where the laser is incident at the wafer edge and perpendicularly to the edge surface.
Considering the offcut angle and the nearly isotropic refractive index of 2.73 for 4H-SiC @shaffer_refractive_1971,
the refracted laser in 4H-SiC during grazing incidence forms an angle of approximately 25° with the c axis.
the refracted laser in grazing incidence forms an angle of approximately 25° with the c axis.
A 100 μm confocal pinhole was used for normal incidence to enhance axial (z-direction) resolution @song_depth_2020,
while a 200 μm pinhole was employed for the other configurations to improve the signal-to-noise ratio.
Besides, the integration time was set to 60 seconds for normal and edge incidence,
The integration time was set to 60 seconds for normal and edge incidence,
while it was extended to 300 seconds for grazing incidence due to the weaker Raman signal.
#include "figure-incidence.typ"