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@@ -28,18 +28,18 @@ The Si/C ratios during growth were 0.7, 1.2, 1.6, 2.4, and 2.0 for the five wafe
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而在掠入射时,拉曼信号较弱,因此使用较长的积分时间(约 300 秒)。
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All Raman experiments were conducted using a LabRAM HR Evolution system in a back-scattering configuration,
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where the collected scattered light propagates in the opposite direction to the incident laser.
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A 532 nm laser served as the primary excitation source,
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where the scattered light was collected in the direction opposite to the incident laser.
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A 532 nm laser was primarily used as the excitation source,
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while a 325 nm laser was employed for only ultraviolet Raman measurements.
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Three distinct incidence configurations were utilized, as illustrated in @figure-incidence:
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(i) normal incidence, where the laser incident perpendicularly to the epitaxial surface;
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(ii) grazing incidence, where the laser incident nearly parallelly to the epitaxial surface;
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and (iii) edge incidence, where the laser is incident at the wafer edge and perpendicularly to the edge surface.
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Considering the 4° offcut angle and the nearly isotropic refractive index of 2.73 for 4H-SiC @shaffer_refractive_1971,
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the refracted laser in 4H-SiC during grazing incidence forms an angle of approximately 25° with the c axis.
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the refracted laser in grazing incidence forms an angle of approximately 25° with the c axis.
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A 100 μm confocal pinhole was used for normal incidence to enhance axial (z-direction) resolution @song_depth_2020,
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while a 200 μm pinhole was employed for the other configurations to improve the signal-to-noise ratio.
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Besides, the integration time was set to 60 seconds for normal and edge incidence,
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The integration time was set to 60 seconds for normal and edge incidence,
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while it was extended to 300 seconds for grazing incidence due to the weaker Raman signal.
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#include "figure-incidence.typ"
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